South Korea develops key semiconductor gas technology

June 12, 2026 - 04:26

A team of South Korean scientists has successfully developed a new method for producing high-purity deuterated ammonia, a critical gas used in advanced semiconductor manufacturing. The technology is expected to significantly reduce defects in next-generation memory and logic chips, giving the country's chip industry a stronger competitive edge.

Deuterated ammonia is a specialized gas that replaces standard ammonia in certain etching and deposition processes. By using deuterium, a heavier isotope of hydrogen, the gas helps prevent the "knock-on" effect where hydrogen atoms damage sensitive transistor structures. This leads to fewer electrical failures and higher chip yields, especially in the production of 3D NAND flash and DRAM.

The research team, working under the Korea Institute of Energy Technology, refined a catalytic reaction process that achieves over 99.9% purity. Previously, South Korea relied almost entirely on imports of this gas from Japan and the United States, which created supply chain vulnerabilities. The new domestic process not only reduces dependence on foreign suppliers but also lowers production costs.

Industry analysts say this development is timely. As chipmakers push toward smaller nodes and more complex architectures, the demand for high-purity specialty gases is rising sharply. The technology is expected to be transferred to local chemical companies for commercial scaling within the next two years.